Park Dong Hee CHOI, WON-KOOK 2024-01-13T00:05:06Z 2024-01-13T00:05:06Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/100101 English linear stationary plasma thruster ion beam modification polymer surface ion current density 600 mm wide linear stationary plasma thruster (LSPT) for a large area ion beam modification Conference 1 Society of Vacuum Coater, pp.37 - 39 Society of Vacuum Coater 37 39 US