Park Dong Hee Yang Jeong-do HONG TAE WOO Ji-Won Choi CHOI, WON-KOOK 2024-01-13T00:05:21Z 2024-01-13T00:05:21Z 2021-09-29 0737-5921 https://pubs.kist.re.kr/handle/201004/100118 English HIPIMS Unbalanced magnetron AZO Characteristics of Al:doped ZnO Thin Films by HIPIMS (High Power Impulse Magnetron Sputtering) with Unbalanced Magnetron Conference 1 Society of Vacuum Coaters Technical Conference Proceedings, pp.32 - 35 Society of Vacuum Coaters Technical Conference Proceedings 32 35 US