Lee Eui-Bok Ki Young Dong Jinn Il Choi Byoeng Kwon Ju Kim, Yong Tae 2024-01-13T01:03:30Z 2024-01-13T01:03:30Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/100789 English phase change pillars lithography Fabrication of patterned phase change pillars by laser interference lithography Conference 1 The 2nd International Conference on Microelectronics and Plasma Technology, pp.172 The 2nd International Conference on Microelectronics and Plasma Technology 172 172 KO