Song, Hyun - Cheol KANG, CHONG YUN YOON, SEOK JIN Kim Hyung Chan 2024-01-13T01:31:25Z 2024-01-13T01:31:25Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/100916 English energy harvesting piezoelectrics MEMS spiral structure shear mode Spiral type Piezoelectric MEMS power generator with shear mode Conference 1 2009 IEEE International Ultrasonics Symposium, pp.589 - 590 2009 IEEE International Ultrasonics Symposium 589 590 US