Lee, Kwang Ryeol 2024-01-13T02:00:44Z 2024-01-13T02:00:44Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/101137 English MD simulation surface interface semiconductor Atomic Scale Simulation of Interface and Surface Phenomena during Thin Film Growth Conference 1 SISPAD 2009 SISPAD 2009 US