Lee Seung-min Tae-Yeon Seong JONG-KEUK, PARK 2024-01-13T02:00:51Z 2024-01-13T02:00:51Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/101145 English a-Si sputtering crystallization thin film Crystallization behavior of amorphous silicon thin film deposited by DC/RF magnetron sputtering with substrate bias Conference 1 AEPSE2009 AEPSE2009 KO