Bong-Hwan Kim Sewan Park Kyuhwan Jung Na, Kyounghwan Yoon, Eui Sung 2024-01-13T02:02:26Z 2024-01-13T02:02:26Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/101260 English MEMS probe card modeling tribology wear contact resistance Reliability modeling of MEMS probe card with vertical guide Conference 1 The 24th International Technical Conference on Circuits/Systems, Computers and Communications The 24th International Technical Conference on Circuits/Systems, Computers and Communications KO