Pham Duc Cuong Arvind Singh Na, Kyounghwan Yang Sung Wook Yoon, Eui Sung 2024-01-13T02:03:24Z 2024-01-13T02:03:24Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/101328 English topographical modification Z-dol friction Adhesion AFM Micro/nano Nanopatterns MEMS Tribology Topographically-Chemically Modified Silicon Surfaces as Tribological Candidates for Miniaturized (MEMS) Devices Conference 1 ICMDT2009 ICMDT2009 KO