Lee, Jeong Hoon Hwang Kyo Seon Kim, Tae Song 2024-01-13T02:30:36Z 2024-01-13T02:30:36Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/101393 English Macro/Micro residual stress analysis of Pb(Zr0.52Ti0.48)O3 Films for piezoelectric microcantilever Conference 1 International workshop on nanomechanical cantilever sensors International workshop on nanomechanical cantilever sensors KO