Na, Kyounghwan Arvind Singh Pham Duc Cuong Yang Sung Wook Yoon, Eui Sung 2024-01-13T02:30:41Z 2024-01-13T02:30:41Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/101398 English Surface modification topographical chemical nano-channel adhesion frictioin tribology Adhesion and friction forces on silicon wafers with dual surface modifications at nano-scale Conference 1 Society of Tribologists and Lubrication Engineers 64th Annual Meeting and Exhibition Society of Tribologists and Lubrication Engineers 64th Annual Meeting and Exhibition US