Pham Duc Cuong Arvind Singh Na, Kyounghwan Yang Sung Wook Yoon, Eui Sung 2024-01-13T02:31:00Z 2024-01-13T02:31:00Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/101423 English AFM DLC Adhesion Friction Surface Modification Nanotribological Properties of Topographically-Chemically Modified Silicon Surfaces Conference 1 ICMCTF, pp.TS-15 ICMCTF TS-15 US