Kim Kyou Hyun Jin-Ha Whang Ahn, Jae Pyoung 2024-01-13T03:01:26Z 2024-01-13T03:01:26Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/101717 English TEM PDP EELS In-situ TEM Investigation on Nucleation and growth behavior of Si Thin Films Conference 1 APMC9, v.1, no.1, pp.95 APMC9 1 1 95 95 KO