Chae youn mee Lee, Soo Hyun Kang, Ji Yoon Park, Jung Ho 2024-01-13T03:02:24Z 2024-01-13T03:02:24Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/101787 English Mass sensor bridge type PZT Fabrication of Doubly Clamped Piezoelectric Resonator with 3㎛ width Conference 2 KMEMS 2008 KMEMS 2008 KO