Youngsoo, Kim Kang-Jin Kim LEE, YEON HEE 2024-01-13T03:04:00Z 2024-01-13T03:04:00Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/101899 English fluorine plasma polymerization ICP CCP XPS TOF-SIMS Analysis of fluorine-containing thin films using surface techniques Conference 1 The 9th Asian conference on analytical sciences, pp.266 The 9th Asian conference on analytical sciences 266 KO