Jong Moon Youn Chang Woo Sun Jeong Yong Lee Kim, Yong Tae 2024-01-13T03:30:41Z 2024-01-13T03:30:41Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/101930 English TEM phase change memory PRAM crystallization Sb-Se-Te A transmission electron microscopy study on the crystallization of Sb-Se-Te thin films deposited by rf sputtering method Conference 1 The 14th International Symposium on the Physics of Semiconductor and Applications (ISPSA), pp.308 The 14th International Symposium on the Physics of Semiconductor and Applications (ISPSA) 308 308 KO