Kim Chung Soo Eun Tae Kim Jeong Yong Lee Kim, Yong Tae 2024-01-13T03:30:42Z 2024-01-13T03:30:42Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/101931 English In-Sb-Te (IST) In3SbTe2 phase change chalcogenide TEM Microstructure alanysis of In-Sb-Te thin films deposited by RF magnetron sputtering Conference 1 The 14th International Symposium on the Physics of Semiconductor and Application (ISPSA), pp.309 The 14th International Symposium on the Physics of Semiconductor and Application (ISPSA) 309 309 KO