Yoon, Eui Sung Pham Duc Cuong Arvind Singh KIM, JINSEOK Yang Sung Wook Kawk, Moon Kyu Kahp-Yang Suh 2024-01-13T03:34:08Z 2024-01-13T03:34:08Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/102172 English MEMS devices AFM surface modification Nano-patterning of Poly (methyl-methacrylate) Polymeric Surface and Effects of Pitch on Hydrophobicity and Tribological Properties Conference 1 Society of Tribologists and Lubrication Engineers 63rd Annual Meeting and Exibition Society of Tribologists and Lubrication Engineers 63rd Annual Meeting and Exibition US