Myoung-Woon Moon Sk. F. Ahmed Yi Jin Woo Lee, Kwang Ryeol 2024-01-13T04:33:42Z 2024-01-13T04:33:42Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/102687 English wrinkle dlc compressive stress pdms dlc Surface Morphology of Compressively Stressed Film Deposited on a Soft Polymer Conference 1 ICMCTF2008 ICMCTF2008 US