Kang Gil Bum Kim, Seong Il Kim, Yong Tae Lee Chang Woo 2024-01-13T06:03:16Z 2024-01-13T06:03:16Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/103455 English Metal nanodot copolymer lithography Reactive ion etching Fabrication of Metal Nano Dot Dry Etching Mask Using Block Copolymer Thin Film Conference 1 NANO KOREA 2007, pp.272 NANO KOREA 2007 272 272 KO