Kim, Seong Il Kang Gil Bum Kim, Yong Tae Lee Chang Woo 2024-01-13T06:03:33Z 2024-01-13T06:03:33Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/103475 English Diblock Copolymer CopolymerLithography Reactive Ion Etching Nanotemplate Controlling the Different Size of Nanoscale Holes Conference 1 The International Conference on Electrical Engineering 2007 The International Conference on Electrical Engineering 2007 HK