Kang Gil Bum Kim, Seong Il Kim, Young Hwan Park, Min Chul Lee Chang Woo Kim, Yong Tae 2024-01-13T06:03:35Z 2024-01-13T06:03:35Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/103477 English diblock copolymer copolymer lithography reactive ion etching Si nano dot nanotemplate Nanodot Arrays Patterned Using Diblock Copolymer Templates Conference 1 International Symposium of Electroceramics 2007, pp.35 International Symposium of Electroceramics 2007 35 35 KO