KANG GHI-YUUN 박형호 Yoon, Dae Sung Kim, Tae Song 2024-01-13T06:32:54Z 2024-01-13T06:32:54Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/103696 English 캔틸레버 솔젤 PZT Direct-Patterned PZT Microcantilever Using Photosensitive Sol-Gel Method Conference 1 ISIF 2006 ISIF 2006 US