Chun Dong Won Hwang Kyo Seon 이정훈 Yoon, Dae Sung 이우영 Kim, Tae Song 2024-01-13T06:32:55Z 2024-01-13T06:32:55Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/103697 English 질량검출 캔틸레버 PZT Ultra-High Sensitive PZT Thin Film Cantilever for Femtogram Mass Detection Conference 1 ISIF 2006 ISIF 2006 US