Kim Dong-Ik Hyo-Jong Lee Kyu Hwan Oh Hu-Chul Lee 2024-01-13T06:33:39Z 2024-01-13T06:33:39Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/103749 English Cu interconnect damascene EBSD recrystallization Investigation into the Recrystallization Phenomena of Cu Damascene Line Conference 1 16th International Microscopy Congress 16th International Microscopy Congress JA