Chun Dong Won Hwang Kyo Seon Jeong Hoon Lee Kilho Eom Cha Byung Hak Woo Young Lee Yoon, Dae Sung Kim, Tae Song 2024-01-13T07:03:43Z 2024-01-13T07:03:43Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/104024 English Resonant characteristic of the PZT thin film microcantilever with mass sensitivity of femto-gram level for biomolecule detection Conference 2 Korea MEMS Conference Korea MEMS Conference KO