Mi Jung Lee, Seok Byun, Young Tae Jhon, Young Min Kim, Sun Ho Mho,Sun-il Woo, Deok Ha 2024-01-13T07:30:37Z 2024-01-13T07:30:37Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/104062 English III-V Semiconductor Nanohole Array Nanoporous Alumina Mask ICP-RIE Fabrication of Size Controlled Nanohole Array on III-V Semiconductor substrate by ICP-RIE using nanoporous alumina mask Conference 1 IUMRS-ICA-2006 IUMRS-ICA-2006 KO