JONG-KEUK, PARK Baik, Young Joon C.Ziebert M. Sueber 2024-01-13T07:30:41Z 2024-01-13T07:30:41Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/104067 English Improvement of Hardness and Toughness of TiAlN Coatings by Nanoscale Multilayered Structurization with Amorphous Si-N Phase Conference 1 PSE 2006 PSE 2006 GW