Ryu, Jaewook Kim, Jin Hyeck Chu sung il Moon, Sung Wook 2024-01-13T07:31:13Z 2024-01-13T07:31:13Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/104104 English Fabrication and Mechanical Characterization of MEMS Based Vertical Probe Tips for Measurements of Micro Pads Conference 1 Microprocesses and Nanotechnology 2006, pp.340 - 341 Microprocesses and Nanotechnology 2006 340 341 JA