Kim, Yong Tae Chang Woo Lee 2024-01-13T07:32:37Z 2024-01-13T07:32:37Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/104201 English diffusion barrier tungsten nitride Effects of NH3 pulse plasma on atomic layer deposition of tungsten nitride diffusion barrier Conference 1 Meeting of The Electrochemical Society Meeting of The Electrochemical Society US