Jung mi Jung Yong-Woo Lee, Seok Byun, Young Tae Jhon, Young Min Kim, Sun Ho Mho,Sun-il Woo, Deok Ha 2024-01-13T08:02:22Z 2024-01-13T08:02:22Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/104452 English GaAs nanohole Nanoporous alumina ICP-RIE Formation of GaAs Nanohole Array using Nanoporous Alumina Mask by Inductively Coupled Plasma Reactive Ion Etching Conference 2 제 13회 한국반도체학술대회, pp.1125 - 1126 제 13회 한국반도체학술대회 1125 1126 KO