Ku Dae Young Kim In-ho 이인규 LEE, KYEONG SEOK JONG-KEUK, PARK LEE, TAEK SUNG Baik, Young Joon CHEONG, BYUNG KI KIM, WON MOK 2024-01-13T08:30:41Z 2024-01-13T08:30:41Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/104601 English Transparent conducting oxide doping sputtering thin film RF magnetron sputtering Fluorine ZnO Fluorine doping effect of ZnO film by RF magnetron sputtering RF magnetron sputtering을 이용한 ZnO 박막의 F 도핑 효과 Conference 2 한국전기전자재료학회, v.5, no.2, pp.1023 - 1028 한국전기전자재료학회 5 2 1023 1028 KO