유재수 김종민 이용탁 SONG, JIN-DONG 임한조 2024-01-13T08:33:42Z 2024-01-13T08:33:42Z 2021-09-29 0277786 https://pubs.kist.re.kr/handle/201004/104808 English impurity-free vacancy diffusion Disordering of InGaAs/GaAs multi-quantum well structure by impurity-free vacancy diffusion for advanced optoelectronic devices and their integration Conference 1 Proc. of SPIE, v.5729 Proc. of SPIE 5729 US