PARK JONG KOOK Kim, Sun Ho Jin Woo Park Byun, Young Tae 2024-01-13T08:33:53Z 2024-01-13T08:33:53Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/104820 English 산화막 GaAs-on-Si 웨이퍼의 직접 접합 Study on direct wafer bonding for GaAs-on-Si wafers using SiO2 Oxide films SiO2 산화막을 이용한 GaAs-on-Si 웨이퍼의 직접 접합에 관한 연구 Conference 2 PC04 Photonics Conference 2004, pp.FP42 PC04 Photonics Conference 2004 FP42 KO