LEE SEUNG HYEOB Kim Tae Young SEUNG CHEOL, LEE Y-C. Chung D. W. Brenner Lee, Kwang Ryeol 2024-01-13T08:34:06Z 2024-01-13T08:34:06Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/104835 English MD carbon structure stress tetrahedral amorphous carbon molecular dynamics simulation Dispersed Incident Energy compressive residual stress The Structure and Properties of ta-C Film with Dispersion of Incident Beam Energy Conference 1 Int. Conf. Comp. Nanotechnol. Int. Conf. Comp. Nanotechnol. US