V.E. Pukha A.N. Stetsenko S.N. Dub Lee, Joong Kee 2024-01-13T09:00:40Z 2024-01-13T09:00:40Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/104864 English DLC film fullerene C60 ion beam DIAMOND-LIKE CARBON THIN FILMS OBTAINED FROM MONOENERGETIC FULLERENE C60 ION BEAM Conference 1 ISE2005, pp.763 ISE2005 763 763 KO