J. H. Seo C. N. Whang K.-H. Yoo S. S. Kim D. S. Choi CHAE, KEUN HWA 2024-01-13T09:04:14Z 2024-01-13T09:04:14Z 2021-09-29 0277786 https://pubs.kist.re.kr/handle/201004/105098 English Hydrocarbon Silicon Ethylene Simulation Low energy ion scattering (LEIS) Hydrocarbon-associated Si(001) surface structure : CAICISS Conference 1 Proc. of SPIE (SPIE Optics & Photonics 2005 Symposium, 31 July-4 August 2005 in San Diego, CA USA), v.5929, pp.592915-1 - 592915-9 Proc. of SPIE (SPIE Optics & Photonics 2005 Symposium, 31 July-4 August 2005 in San Diego, CA USA) 5929 592915-1 592915-9 US