HAN YONG HEE Kim Kun Tae NGUYEN CHI ANH Shin, Hyun Joon Moon, Sung Wook Choi, In Hoon 2024-01-13T09:31:21Z 2024-01-13T09:31:21Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/105179 English microbolometer surface micromachining vanadium-tungsten oxide Surface micromachined uncooled microbolometer based-on vanadium-tungsten oxide Conference 1 ICMAT(3rd International Conference on Materials for Advanced Technologies) 2005, Symposium F: Nano-O ICMAT(3rd International Conference on Materials for Advanced Technologies) 2005, Symposium F: Nano-O SI