Hwang Kyo Seon Yoon, Dae Sung Ki Hyun Yoon Kim, Tae Song Lee, Jeong Hoon 2024-01-13T10:01:22Z 2024-01-13T10:01:22Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/105445 English resonance frequency PZT thin film cantilever biosensor Effects of liquid viscosity and density on resonant behavior of nano-mechanical PZT (52/48) thin film cantilever Conference 1 ISIF 2004 ISIF 2004 US