Yong Sun Lee Yoon, Dae Sung Kim, Tae Song 2024-01-13T10:01:25Z 2024-01-13T10:01:25Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/105448 English PZT flexural plate wave biosensor mems Improvement of the mass sensitivity in flexural plate wave device Conference 1 ISIF 2004 ISIF 2004 US