Kwon Young Suk SHIN, SUN IL KIM IK SOO Kim, Seong Il Kim, Yong Tae In-Hoon Choi 2024-01-13T10:03:09Z 2024-01-13T10:03:09Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/105558 English Etch stop Process of SrBi2Ta2O9 thin film using CeO2 buffer layer for self aligned ferroelectric gate structure Conference 1 The 12th Seoul International Symposium on the Physics of Semiconductors and Applications-2004, pp.174 The 12th Seoul International Symposium on the Physics of Semiconductors and Applications-2004 174 174 KO