Ai Ying Wang Lee, Kwang Ryeol 2024-01-13T10:32:47Z 2024-01-13T10:32:47Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/105803 English DLC hybrid ion beam stress structure Effect of Substrate Bias on Structure and Properties of W Incorporated Diamond-like Carbon Films Conference 1 Mat. Res. Soc. Symp. Proc., v.821, pp.P3.22.1 - P3.22.6 Mat. Res. Soc. Symp. Proc. 821 P3.22.1 P3.22.6 US