Heon Woong Choi 문명운 KIm Tae Young Lee, Kwang Ryeol Kyu Hwan Oh 2024-01-13T10:32:48Z 2024-01-13T10:32:48Z 2021-09-29 0272-9172 https://pubs.kist.re.kr/handle/201004/105804 English DLC thermal anneling residual stress The Thermal Annealing Effect on the Residual Stress and Interface Adhesion in the Compressive Stressed DLC Film Conference 1 Materials Research Society Symposium Proceedings, v.795, pp.U11.42.1(87) - U11.42.6(92) Materials Research Society Symposium Proceedings 795 U11.42.1(87) U11.42.6(92) US