Myoung Woon Moon Lee, Kwang Ryeol 정진원 오규환 2024-01-13T10:32:49Z 2024-01-13T10:32:49Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/105805 English DLC Delamination Chemical vapor deposition (CVD) Defect FIB An Study of Influence of Imperfections on the Delamination of Diamond-like Carbon Films Conference 1 Mat. Res. Soc. Symposium Proceeding, v.719, pp.F8.36.1 - F8.36.5 Mat. Res. Soc. Symposium Proceeding 719 F8.36.1 F8.36.5 US