Shim, Juno Kwak, Soonjong 2024-01-13T10:33:45Z 2024-01-13T10:33:45Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/105868 English silicon oxynitride plasma enhanced chemical vapor deposition gas barrier plastic substrate Plasma-enhanced chemical vapor deposition of silicon oxynitride films and their gas barrier properties Conference 1 Polymer Processing Society Polymer Processing Society US