정민철 이태경 Park, Young Ju 고창훈 전승호 함철영 한문섭 박경완 2024-01-13T11:00:49Z 2024-01-13T11:00:49Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/105942 English nanostructure quantum confinement effect TEM XPS surface modification Nanostructures of SiNx and Si formed by exposure of ionized gas Conference 2 The 10th Korean Conference on Semiconductors, pp.121 - 122 The 10th Korean Conference on Semiconductors 121 122 KO