Kim, Doo In Ahn, Hyo-Sok 2024-01-13T11:02:11Z 2024-01-13T11:02:11Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/106032 English microsystem humidity adsorption layer capillary force shear stress Tribological Properties of Adsorbed Water Layer on Silicon Surfaces with Different Hydrophilicity under Various Humid Environments Conference 1 Int.Conf. on Metallurgical Coatings and thin Films, pp.20 Int.Conf. on Metallurgical Coatings and thin Films 20 20 US