JONG-YEON PARK KIM GEUN TAE Moon Sung Wook PARK JEONG HO 2024-01-13T11:03:04Z 2024-01-13T11:03:04Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/106088 English plastic micromachining PDMS 3D MEMS UV-lithography mesh structure bonding Fabrication of 3D MEMS antenna for IR detector using novel UV-lithography, plastic micro machining and mesh structure bonding technique Conference 1 17th European Conference on Solid-State Transducers 17th European Conference on Solid-State Transducers PO