김용국 배용환 강유리 Kim Jai Kyeong KIM SOO WON Ju Byeong Kwon 2024-01-13T11:33:11Z 2024-01-13T11:33:11Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/106362 English FBAR thin wafer MEMS piezoelectric effect Fabrication of flexible FBAR using thin silicon wafer. 박막 실리콘 웨이퍼를 이용한 압전박막공진기 제작 = Conference 2 한국 MEMS 학술대회, pp.380 - 383 한국 MEMS 학술대회 380 383 KO