KIM HYUNG JOON Yong-Bum Kim Jaebum Park Kim, Tae Song 2024-01-13T12:02:38Z 2024-01-13T12:02:38Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/106590 English thick film PZT cantilever biochip Biological element detection sensor application of micromachined PZT thick film cantilever Conference 1 IEEE Sensors 2003, Book of Abstracts, pp.353 - 354 IEEE Sensors 2003, Book of Abstracts 353 354 US