J.H. Lee Choi Won Jun Park Young Ju Han Il Ki Cho Woon Jo Lee Jung Il E.K. Kim 2024-01-13T12:03:45Z 2024-01-13T12:03:45Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/106663 English Impurity free vacancy disordering of self-assembled InGaAs quantum dots by using PECVD-grown SiO ₂ and SiNx capping films. Conference 1 2nd International Conference on Semiconductor Quantum Dots (QD2002), pp.159 2nd International Conference on Semiconductor Quantum Dots (QD2002) 159 159 JA